Brooks Automation 001-4130-03 Mass Flow Controller
The Brooks Automation 001-4130-03 Mass Flow Controller is a precision instrument engineered for semiconductor manufacturing processes requiring exact gas flow control. Its thermal sensor technology and proportional valve design deliver repeatable performance in critical applications like deposition and etching, where even minor flow variations can impact wafer quality.
Technical Specifications
| Parameter | Specification |
|---|---|
| Brand | Brooks Automation |
| Model | 001-4130-03 |
| Operating Range | 0-50 sccm |
| Accuracy | ±0.5% reading + 0.1% full scale |
| Valve Type | Proportional Valve |
| Power Supply | 24 VDC |
In semiconductor fabrication lines, this MFC maintains process consistency even under fluctuating environmental conditions. A customer in Hsinchu recently reported achieving 99.8% repeatability in their atomic layer deposition system after upgrading to this model. We frequently pair this controller with Brooks’ 001-4130-01/02 series units for multi-gas systems, and it integrates seamlessly with existing Brooks Automation infrastructure.
Our Value Proposition
With 16 regional warehouses spanning 6 countries, we maintain competitive pricing while offering 1-year warranties on all new units. Our engineers support system integrations across major platforms including Brooks Automation, ABB AC1027, and GE VMIVME-7807 systems. For urgent requirements, contact us via WhatsApp or email abbocs36@gmail.com for real-time availability and pricing.
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